P2GS.13 - Fabrication of ZnO-Based Ethanol Gas Sensors Using Aerosol-Assisted Atmospheric Pressure Plasma
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
- P-2 - Gas Sensors
- D. Kim, J. Lee, H. Lee - Electronics and Telecommunications Research Institute (ETRI), Daejeon (Republic of Korea), C. Park, H. Tae - School of Electronics Engineering, College of IT Engineering, Kyungpook National University, Daegu (Republic of Korea)
- 792 - 793
This contribution studies a fast and simple method for depositing metal oxides by using an aerosolassisted atmospheric pressure plasma process. ZnO films were deposited on arbitrary substrates and characterized by scanning electron microscopy and X-ray diffraction. In addition, ZnO-based gas sensors were tested for the detection of ethanol gas at concentrations between 100 ppb to 1000 ppb. In this study, ZnO was adopted as an example of metal oxides that can be deposited but it is possible to produce various metal oxides using the aerosol-assisted atmospheric pressure plasma process.