P2GS.11 - Cu2O/CuO thin film p-p nano-heterostructures for gas sensing
- Event
- 17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
Vienna, Austria - Chapter
- P-2 - Gas Sensors
- Author(s)
- K. Zakrzewska, W. Maziarz, K. Schneider - AGH University of Science and Technology, Faculty of Computer Science, Electronics and Telecommunications, Krakow (Poland), M. Mazur, D. Wojcieszak, D. Kaczmarek - Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wrocław (Poland)
- Pages
- 789 - 790
- DOI
- 10.5162/IMCS2018/P2GS.11
- ISBN
- 978-3-9816876-9-9
- Price
- free
Abstract
Thin films of Cu2O/CuO deposited by reactive magnetron sputtering followed by controlled annealing in air are proposed as new p p type nano-heterostructures for gas sensing. Homogenous Cu2O thin films are obtained up to 20% O2 in Ar+O2 sputtering atmosphere. Annealing for 1h at 400oC results in bilayer structure of Cu2O/CuO sensitive to 8 ppm NO2 at 155oC.