2025 SMSI Bannerklein

P2GS.11 - Cu2O/CuO thin film p-p nano-heterostructures for gas sensing

Event
17th International Meeting on Chemical Sensors - IMCS 2018
2018-07-15 - 2018-07-19
Vienna, Austria
Chapter
P-2 - Gas Sensors
Author(s)
K. Zakrzewska, W. Maziarz, K. Schneider - AGH University of Science and Technology, Faculty of Computer Science, Electronics and Telecommunications, Krakow (Poland), M. Mazur, D. Wojcieszak, D. Kaczmarek - Wrocław University of Science and Technology, Faculty of Microsystem Electronics and Photonics, Wrocław (Poland)
Pages
789 - 790
DOI
10.5162/IMCS2018/P2GS.11
ISBN
978-3-9816876-9-9
Price
free

Abstract

Thin films of Cu2O/CuO deposited by reactive magnetron sputtering followed by controlled annealing in air are proposed as new p p type nano-heterostructures for gas sensing. Homogenous Cu2O thin films are obtained up to 20% O2 in Ar+O2 sputtering atmosphere. Annealing for 1h at 400oC results in bilayer structure of Cu2O/CuO sensitive to 8 ppm NO2 at 155oC.

Download