2025 SMSI Bannerklein

A2.4 Investigations of the Actuator Based on Lithium Niobate Diffuse Bonded Bimorph Structure

Event
SMSI 2020
-
(did not take place because of Covid-19 virus pandemic)
Band
SMSI 2020 - Sensors and Instrumentation
Chapter
A2 Piezoelectric High-temperature Sensors
Author(s)
U. Yakhnevych, O. Buryy, S. Ubizskii, D. Sugak - Lviv Polytechnic National University, Lviv (Ukraine), Y. Suhak, H. Fritze - Clausthal University of Technology, Goslar (Germany), I. Syvorotka - Scientific Research Company “Electron-Carat”, Lviv (Ukraine)
Pages
55 - 56
DOI
10.5162/SMSI2020/A2.4
ISBN
978-3-9819376-2-6
Price
free

Abstract

The simulation of the actuator based on lithium niobate bimorph (bidomain) structure was carried out by the finite elements method. The calculated value of the displacement of the actuator was about 17.8 m at the voltage of 300 V. Based on results of simulation, an actuator was manufactured from the oppositely polarized plates of congruent lithium niobate bonded by diffusion of copper from the film placed between the plates. It was found that the displacement of this actuator is equal to 9 nm upon
the applied voltage of 1 V, and to 26.5 nm upon 3 V.

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