A5.1 Development of a 3D-integrated Thermocatalytic Sensor for Combustible Gas Detection

Event
SMSI 2020
-
(did not take place because of Covid-19 virus pandemic)
Band
SMSI 2020 - Sensors and Instrumentation
Chapter
A5 Sensor Materials and Technologies
Author(s)
F. Münchenberger, S. Dreiner, H. Kappert, R. Neubieser, H. Vogt - Fraunhofer Institute for Microelectronic Circuits and Systems, Duisburg (Germany)
Pages
77 - 78
DOI
10.5162/SMSI2020/A5.1
ISBN
978-3-9819376-2-6
Price
free

Abstract

A process to integrate a thermocatalytic sensor on top of a CMOS circuitry is presented. Therefore, COMSOL Multiphysics® simulations are performed to evaluate a heater with an optimized temperature uniformity and a suspended design of the sensor element to achieve thermal decoupling from the substrate. The steps for fabrication are shortly described using ALD materials and a sacrificial layer. An example for a released heater structure is shown.

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