A5.1 Development of a 3D-integrated Thermocatalytic Sensor for Combustible Gas Detection
- SMSI 2020
(did not take place because of Covid-19 virus pandemic)
- SMSI 2020 - Sensors and Instrumentation
- A5 Sensor Materials and Technologies
- F. Münchenberger, S. Dreiner, H. Kappert, R. Neubieser, H. Vogt - Fraunhofer Institute for Microelectronic Circuits and Systems, Duisburg (Germany)
- 77 - 78
A process to integrate a thermocatalytic sensor on top of a CMOS circuitry is presented. Therefore, COMSOL Multiphysics® simulations are performed to evaluate a heater with an optimized temperature uniformity and a suspended design of the sensor element to achieve thermal decoupling from the substrate. The steps for fabrication are shortly described using ALD materials and a sacrificial layer. An example for a released heater structure is shown.