B2.5 Modeling the fluid-structure interaction of non-conventional vibrational modes for MEMS fluid sensing
- SMSI 2020
(did not take place because of Covid-19 virus pandemic)
- SMSI 2020 - Sensors and Instrumentation
- B2 Flow Measurement
- D. Platz, A. Gesing, U. Schmid - Technische Universität Wien, Vienna (Austria)
- 109 - 110
Understanding of the fluid-structure interaction between a mechanical resonator and a surrounding fluid is key for understanding and predicting the performance of MEMS fluid property sensors. Here, we present a novel method for modelling the fluid-structure interaction between a viscous fluid and vibra-tional eigenmodes of a plate-like MEMS resonator. The elastic dynamics of the MEMS resonator nu-merically determined by a finite element method while the fluid flow is obtained from a boundary integral formulation. With this method we compute the spectral response of MEMS plate resonators in fluids.