B2.5 Modeling the fluid-structure interaction of non-conventional vibrational modes for MEMS fluid sensing
- Event
- SMSI 2020
-
(did not take place because of Covid-19 virus pandemic) - Band
- SMSI 2020 - Sensors and Instrumentation
- Chapter
- B2 Flow Measurement
- Author(s)
- D. Platz, A. Gesing, U. Schmid - Technische Universität Wien, Vienna (Austria)
- Pages
- 109 - 110
- DOI
- 10.5162/SMSI2020/B2.5
- ISBN
- 978-3-9819376-2-6
- Price
- free
Abstract
Understanding of the fluid-structure interaction between a mechanical resonator and a surrounding fluid is key for understanding and predicting the performance of MEMS fluid property sensors. Here, we present a novel method for modelling the fluid-structure interaction between a viscous fluid and vibra-tional eigenmodes of a plate-like MEMS resonator. The elastic dynamics of the MEMS resonator nu-merically determined by a finite element method while the fluid flow is obtained from a boundary integral formulation. With this method we compute the spectral response of MEMS plate resonators in fluids.