D5.3 Three-directional Drift Correction Method Based on Iterative Closest Point (ICP) Algorithm
- Event
- SMSI 2020
-
(did not take place because of Covid-19 virus pandemic) - Band
- SMSI 2020 - Measurement Science
- Chapter
- D5 Advanced Methods & Measurement Systems
- Author(s)
- J. Degenhardt, G. Dai - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany), R. Tutsch - Technische Universität Braunschweig, Braunschweig (Germany)
- Pages
- 297 - 298
- DOI
- 10.5162/SMSI2020/D5.3
- ISBN
- 978-3-9819376-2-6
- Price
- free
Abstract
A new method for evaluating and correcting full three-dimensional drift in AFM measurements has been proposed. The method applies two measurement sets: (A) Multiple measurements with reduced resolution and thus reduced measurement time and drift; and (B) One detailed measurement with higher spatial resolution at costs of longer measurement time and larger drift. The data sets are aligned using the iterative closest point (ICP) algorithm to quantitatively evaluate the drift in full 3D. The obtained drifts are then applied to correct the measured data sets to significantly reduce drifts.