P3.6 Indirect geometry measurement method for in situ application in laser chemical machining
- SMSI 2020
(did not take place because of Covid-19 virus pandemic)
- SMSI 2020 - Measurement Science
- P3 Advanced Methods and Approaches in Measurement
- M. Mikulewitsch, D. Stöbener, A. Fischer - University of Bremen, Bremen (Germany)
- 327 - 328
The optical geometry measurement of submerged micro-surfaces in chaotic fluid environments, e.g. for electric discharge machining (EDM) or laser chemical machining (LCM), is challenging when the specimen feature high aspect ratios and steep surface gradients. To avoid reflection-caused artifacts at steep gradients, fluorescent molecules are added to the fluid, whose fluorescence is detected with a confocal setup. A model-based signal processing enables an indirect measurement in fluid layers > 1 mm and is capable to cope with process-inherent bubbles and surface gradients up to 84°.