A4.1 A Metrological Atomic Force Microscope for Large Range Measurements with Sub-nanometre Resolution
- SMSI 2021
2021-05-03 - 2021-05-06
- SMSI 2021 - Sensors and Instrumentation
- A4 Force, Pressure and Torque Measurement
- Y. Wu, E. Wirthmann, U. Klöpzig, T. Hausotte - Friedrich-Alexander-Universität Erlangen-Nürnberg, Erlangen (Germany)
- 61 - 62
Calibration of standards is a very important task in dimensional metrology. In this paper large range measurements of pitch standards using a metrological atomic force microscope (MAFM) with combined deflection detection system, that comprises a homodyne interferometer and a tilt measuring system, are presented. The combination allows the simultaneous three-dimensional detection of tip position and cantilever bending and torsion. The combination of the MAFM sensor with the Nanopositioning and Nanomeasuring Machine allows improved quality in calibration of standards such as step height standards, pitch standards and flatness standards. This paper introduces its application for measurements of pitch standards working in contact mode (CM) and in intermitted contact mode (IM).