| SMSI 2021 |
A5.1 Design, Simulation, Fabrication and Characterization of Piezoelectric MEMS Cantilever for Gas Density and Viscosity Sensors Applications |
A. Mehdaoui, C. Huber, J. Becker, F. Schraner - TrueDyne Sensors AG, Reinach (Switzerland), L. Villanueva - Ecole Polytechnique Fédérale de Lausanne, Lausanne (Switzerland) |
| SMSI 2021 |
A5.2 Swarm-Based Multi-Objective Design Optimization of Single-Plate Condenser MEMS Microphone |
Q. Zaman, S. Alraho, A. König - TU Kaiserslautern, Kaiserslautern (Germany) |
| SMSI 2021 |
A5.3 Designing Low Power Systems with Digital MEMS Sensors |
P. Stukjunger - STMicroelectronics, Prague (Czech Republic) |
| SMSI 2021 |
A5.4 Self-excited Contact Resonance Operation of a Tactile Piezoresistive Cantilever Microprobe with Diamond Tip |
M. Fahrbach, E. Peiner - Technische Universität Braunschweig, Braunschweig (Germany), M. Xu, U. Brand - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany) |