Available documents
| Event | Title | Author(s) |
|---|---|---|
| SMSI 2021 | B7.1 Highly Stable Pressure Sensors made of <110> Silicon | T. Frank, R. Röder, S. Jagomast, H. Übensee, A. Cyriax, T. Ortlepp - Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany) |
| SMSI 2021 | B7.2 Influence of the Gas Velocity on the Temperature Homogeneity of Transducers for Gas Sensors | J. Herrmann, T. Kern, G. Hagen, R. Moos - University of Bayreuth, Bayreuth (Germany) |
| SMSI 2021 | B7.3 Influences of the Microstructure on the Drift Velocity of Electromigrating Aluminum through Molybdenum Disilicide Thin films | M. Schädel, J. Baldauf - CiS Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany) |