A8.1 Electrostatic Transducer for Ultrasound Ranging Based on In-Plane Electrode Motion
- SMSI 2021
2021-05-03 - 2021-05-06
- SMSI 2021 - Sensors and Instrumentation
- A8 Ultrasonic Transducers and Measurement
- J. Monsalve, F. Wall, M. Jongmanns, S. Langa, M. Kircher, B. Kaiser, A. Melnikov, I. Marica-Bercu - Fraunhofer Institute IPMS, Dresden (Germany), H. Schenk - Arioso Systems GmbH, Dresden (Germany)
- 89 - 90
A Micromachined Ultrasound Transducer (MUT) based on in-plane actuation is presented in this paper. Its building block, unlike membrane-based MUTs, is a Coulomb-actuated microbeam that is deflected in the in-plane direction. This system is designed to operate at low-frequency ultrasound waves, aiming for gesture recognition applications. The sensing function is demonstrated in this work, complementing an earlier report on its transmission characteristics.