B6.4 Spectral Response of MEMS Plate Resonators Exhibiting Non-conventional Vibrational Modes in Fluids
- SMSI 2021
2021-05-03 - 2021-05-06
- SMSI 2021 - Sensors and Instrumentation
- B6 Flow Measurement
- D. Platz, A. Gesing, U. Schmid - TU Wien, Wien (Austria)
- 143 - 144
Understanding of the fluid-structure interaction between a MEMS resonator and a surrounding fluid is key for understanding and predicting the dynamics of MEMS resonators in fluids. Here, we present a numerical method for modelling the fluid-structure interaction between a viscous fluid and vibrational eigenmodes of a plate-like MEMS resonator. The dynamics of the MEMS resonator is determined using a finite element method while the fluid flow is obtained from a boundary integral formulation. With this method we compute the spectral response of MEMS plate resonators in fluids.