C1.2 Thermopile Arrays for IR Imaging and Body Temperature Screening Applications
- SMSI 2021
2021-05-03 - 2021-05-06
- SMSI 2021 - Sensors and Instrumentation
- C1 IRS² Satellite Conference: Infrared Sensors
- J. Schieferdecker, M. Schnorr, B. Forg, F. Herrmann, C. Schmidt, W. Leneke, M. Simon - Heimann Sensor GmbH, Dresden (Germany)
- 175 - 176
Infrared arrays found their way into wide spread applications in various industries. Due to increasing resolutions and decreasing costs the growth rates for Infrared (IR) imaging sensors and cameras are assumed to continue having double digit annual growth rates also for the coming decade of the twenties. While photon IR detectors have been the drivers for thermal imaging in last century, the innovations in Si microelectronics and MEMS paved the way of success for uncooled thermal detector arrays. Pyroelectric arrays, which lead to the very first automotive night vision camera with 80000 pixels in year 2000 /1/, fell back due to their need of continuous mechanical modulation and the difficulty to integrate pyroelectric sensitive materials into monolithic CMOS structures. After that, micro-bolometers dominated the high resolution imaging markets /2/; while fully monolithic Poly-Si type IR thermopiles where the trendsetters for lower resolution consumer applications.