C5.2 Indirect Geometry Measurement for Laser Chemical Machining Using a Model-based Signal Processing Approach
- SMSI 2021
2021-05-03 - 2021-05-06
- SMSI 2021 - Sensors and Instrumentation
- C5 Process Monitoring
- M. Mikulewitsch, D. Stöbener, A. Fischer - University of Bremen, Bremen (Germany)
- 208 - 209
The optical geometry measurement of submerged micro-surfaces in chaotic fluid environments, e.g., for electric discharge machining (EDM) or laser chemical machining (LCM), is challenging when the specimen features high aspect ratios and steep surface gradients. To avoid reflection-caused artifacts at steep gradients, fluorescent molecules are added to the fluid and the geometry of the fluid layer is measured using a confocal fluorescence microscope. A model-based signal processing enables a robust, indirect measurement in fluid layers > 1 mm, since it is capable to cope with process-inherent bubbles and surface gradients up to 85°.