C6.1 - Fluid-Structure Interaction of MEMS Resonators
- Event
- SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg - Band
- Lectures
- Chapter
- C6 - Simulation
- Author(s)
- D. Platz, A. Gesing, U. Schmid - Technische Universität Wien, Vienna (Austria)
- Pages
- 181 - 182
- DOI
- 10.5162/SMSI2023/C6.1
- ISBN
- 978-3-9819376-8-8
- Price
- free
Abstract
The modelling of the fluid-structure interaction of MEMS resonators with a surrounding fluid is a formidable challenge. Only for resonators with slender beam geometries reliable methods are available. Here, we present a novel modelling approach that overcomes the geometry restrictions of beam-based methods while still being computationally efficient. We use this method to study the spectral response of a MEMS resonator immersed in a liquid. The results give insights into the fluid-structure interaction of MEMS resonators that could not have been achieved with established methods.