D2.2 - Advanced Error Modelling of a Fourier Scatterometer
- Event
- SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg - Band
- Lectures
- Chapter
- D2 - New Developments in Mathematics for Metrology
- Author(s)
- M. van Dijk, G. Kok - VSL - Narional Metrology Institute, Delft (Netherlands)
- Pages
- 207 - 208
- DOI
- 10.5162/SMSI2023/D2.2
- ISBN
- 978-3-9819376-8-8
- Price
- free
Abstract
Several error sources of a Coherent Fourier Scatterometer have been modelled to improve the accuracy and uncertainty evaluation of the measurement of geometrical dimensions of gratings, such as the critical dimension, height and pitch. Using the error model, the sensitivities of the geometrical dimensions of a grating to the error sources have been evaluated. In combination with the uncertainties of these error sources, these sensitivities can provide insight into how to improve measurements of gratings with nano dimensions, which can be of great benefit to the semiconductor industry.