3.3.2 - Micropillars patterned surface on in-plane MEMS resonator for enhanced airborne fine particles detection

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Lectures

Chapter

Physical Sensors

Author(s)

J. SOREL, F. Marty, E. Algré - Univ Gustave Eiffel,Marne-la-Vallee (France), P. Didier, L. A. Ali Yahia, E. Géhin - Univ Paris-Est Creteil,Creteil (France)

Pages

125 - 126

DOI

10.5162/eurosensors2026/3.3.2

ISBN

978-3-910600-12-6

Price

free

Abstract

In this paper, the impact of micropillars surface patterning on an in-plane MEMS resonator is described. Although lamé mode resonance frequency of patterned surface is found at a lower value than the plain one, the quality factor remains on the same order, confirming that particle detection is still feasible. Experiments involving inertial impaction of Polystyrene Latex (PSL) beads on these sensors, tend to show that ratio between pillars spacing and particle diameter is key to control local collection efficiency.