8.2.4 - Chip-scale Electrochemical Angular Accelerometer based on SOI Substrate
- Event
- EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich - Band
- Lectures
- Chapter
- Physical Sensors
- Author(s)
- M. Zhu, Y. Lu, D. Chen, J. Wang - Aerospace Information Research Institute,Beijing (CN) and University of Chinese Academy of Sciences,Beijing (CN), B. Liu - Minzu University of China,Beijing (China)
- Pages
- 262 - 263
- DOI
- 10.5162/eurosensors2026/8.2.4
- ISBN
- 978-3-910600-12-6
- Price
- free
Abstract
This paper reports a chip-scale MEMS electrochemical angular accelerometer (EAA) based on an SOI substrate, featuring a monolithically integrated microchannel and sensitive electrodes. By employing 3D plate electrodes with a reduced 10 μm gap, redundant silicon area is minimized. Enhanced high-frequency sensitivity and lowered noise levels are achieved within a compact 10 × 10 × 1.5 mm³ foot-print, making the device well-suited for unmanned aerial vehicle (UAV) attitude detection and control.