8.2.6 - ZnO@ZIF-8 Doubly Clamped Microbeam Resonator for Detection of VOCs
- Event
- EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich - Band
- Lectures
- Chapter
- Physical Sensors
- Author(s)
- D. Rajagopal, C. Wang, B. P. Madeira, M. Kraft - KU Leuven,Leuven (Belgium), B. Chakraborty, A. Padunnappattu, N. Stock, R. Adelung - Kiel University,Kiel (Germany)
- Pages
- 266 - 267
- DOI
- 10.5162/eurosensors2026/8.2.6
- ISBN
- 978-3-910600-12-6
- Price
- free
Abstract
This paper reports the fabrication and characterization of a doubly clamped ZnO@ZIF-8 microbeam resonator for the detection of volatile organic compounds (VOCs), in which a single heterostructure material provides both actuation and gas sensing functionality. The ZIF-8 layer, with its tuneable porosity and molecular sieving capability, enables selective adsorption of VOC molecules, while the ZnO core ensures efficient piezoelectric actuation. The ZnO@ZIF-8 device exhibits a resonance frequency of 4.5 MHz with a quality factor (Q) of 204. Upon exposure to 300 ppm ethanol, a frequency shift (Δf) of 732 Hz is observed, demonstrating the potential of the proposed structure for VOC sensing applications.