7.2.3 - In-Situ Spatial Mapping of Microjet Impingement with a Piezoresistive Silicon Nanowire MEMS Sensor

L. Demirkazik; I. N. Samci; M. J. Ghourichaei; O. Aydin; B. Aksoy; G. Nadar; U. Kerimzade; B. E. Alaca; C. Aydogan; I. W. Rangelow; A. D. Yalcinkaya; H. Bayraktar

7.2.3 - In-Situ Spatial Mapping of Microjet Impingement with a Piezoresistive Silicon Nanowire MEMS Sensor

Event: EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich
Band: Lectures
Chapter: Physical Sensors
Author(s): L. Demirkazik, I. N. Samci, M. J. Ghourichaei, O. Aydin, B. Aksoy, G. Nadar, U. Kerimzade, B. E. Alaca - Koç University,Istanbul (Türkiye), C. Aydogan, I. W. Rangelow - Technische Universität Ilmenau,Ilmenau (Germany), A. D. Yalcinkaya - Boğaziçi University,Istanbul (Türkiye), H. Bayraktar - Istanbul Technical University,Istanbul (Türkiye)
Pages: 232 - 233
DOI: 10.5162/eurosensors2026/7.2.3
ISBN: 978-3-910600-12-6
Price: free

Abstract

We present an in-situ sensing framework for spatial mapping of impinging microjet plume-surface inter-action at the sub-mm nozzle scale using a piezoresistive silicon nanowire (SiNW) MEMS sensor. A bilinear response surface in jet momentum (J) and stand-off ratio (h/d) measures resistance change (ΔR/R₀) across h/d = 2.5–10. Spatial maps acquired with 20 µm along-track sampling and sub-nW power resolve stand-off-dependent changes in both peak loading and spatial structure of the impingement.