8.2.3 - A Next Generation HVM Process Platform for High Performance IMU Devices
- Event
- EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich - Band
- Lectures
- Chapter
- Physical Sensors
- Author(s)
- T. Macha, A. Behroudj, D. Richter, C. Schwenk, H. Stahl, A. Grosse - Robert Bosch GmbH,Reutlingen (Germany)
- Pages
- 260 - 261
- DOI
- 10.5162/eurosensors2026/8.2.3
- ISBN
- 978-3-910600-12-6
- Price
- free
Abstract
We report on our next generation high-volume manufacturing (HVM) process platform for high performance inertial-measurement unit (IMU) devices. While footprint is reduced, it achieves a 40% increase in sensitivity for gyroscope and accelerometer with reduced noise level and improved vibration robustness. New process modules have been implemented and combined to accomplish stable production and application requirements.