3.3.4 - A Mixed-Level Model for Force-Feedback Controlled Piezoelectric MEMS Microphones

Event

EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich

Band

Lectures

Chapter

Physical Sensors

Author(s)

T. Friebe, G. Schrag - Technical University of Munich (TUM),Munich (Germany), F. Schiller, C. Bretthauer - Infineon Technologies AG,Munich (Germany)

Pages

128 - 129

DOI

10.5162/eurosensors2026/3.3.4

ISBN

978-3-910600-12-6

Price

free

Abstract

We present a mixed-level model for a force-feedback controlled piezoelectric MEMS microphone. The approach combines a 2D axisymmetric FEM model of the piezoelectric transducer with an equivalent circuit describing parasitic electrical effects. The model enables accurate prediction of electromechanical behavior and electrical feedthrough over a wide frequency range up to 100 MHz. The implementation supports co-simulation with force-feedback controller models via LiveLink™ to Simulink.