C3.3 Development of a scalable nanotube-microbolometer technology
- Event
- SMSI 2020
-
(did not take place because of Covid-19 virus pandemic) - Band
- SMSI 2020 - Sensors and Instrumentation
- Chapter
- C3 IRS² Satellite Conference: Infrared Cameras and Thermal Imaging
- Author(s)
- M. Michel, S. Weyers, D. Weiler, T. Geruschke, S. Blaeser, E. Zakizade, F. Hochschulz, H. Vogt - Fraunhofer Institute for Microelectronic Circuits and Systems, Duisburg (Germany)
- Pages
- 165 - 166
- DOI
- 10.5162/SMSI2020/C3.3
- ISBN
- 978-3-9819376-2-6
- Price
- free
Abstract
Fraunhofer IMS provides a manufacturing process for microbolometer based FIR-imagers (IRFPAs). Beside classical approaches with membranes of microbolometers thermally isolated by lateral legs, Fraunhofer IMS developed a manufacturing process for a thermal isolation realized by nanotubes. This approach benefits the scalability of pixel pitch, because of a pitch-independent thermal isolation. Latest progress in mechanical stability as well as a qualitative characterization of a demonstrator device with 17 μm nanotube-microbolometers on a 17 μm ROIC in QVGA-resolution will be presented.