C3.3 Development of a scalable nanotube-microbolometer technology
- SMSI 2020
(did not take place because of Covid-19 virus pandemic)
- SMSI 2020 - Sensors and Instrumentation
- C3 IRS² Satellite Conference: Infrared Cameras and Thermal Imaging
- M. Michel, S. Weyers, D. Weiler, T. Geruschke, S. Blaeser, E. Zakizade, F. Hochschulz, H. Vogt - Fraunhofer Institute for Microelectronic Circuits and Systems, Duisburg (Germany)
- 165 - 166
Fraunhofer IMS provides a manufacturing process for microbolometer based FIR-imagers (IRFPAs). Beside classical approaches with membranes of microbolometers thermally isolated by lateral legs, Fraunhofer IMS developed a manufacturing process for a thermal isolation realized by nanotubes. This approach benefits the scalability of pixel pitch, because of a pitch-independent thermal isolation. Latest progress in mechanical stability as well as a qualitative characterization of a demonstrator device with 17 μm nanotube-microbolometers on a 17 μm ROIC in QVGA-resolution will be presented.