C3.4 New high resolution 120x84 Thermopile Arrays for IR Imaging applications
- SMSI 2020
(did not take place because of Covid-19 virus pandemic)
- SMSI 2020 - Sensors and Instrumentation
- C3 IRS² Satellite Conference: Infrared Cameras and Thermal Imaging
- J. Schieferdecker, M. Schnorr, M. Forg, F. Herrmann, C. Schmidt, W. Leneke, M. Simon - Heimann Sensor GmbH, Dresden (Germany)
- 167 - 168
Infrared arrays found their way into wide spread applications in varous industries. Due to increasing resolution and decreasing costs the growth rates for Infrared (IR) imaging sensors and cameras are assumed to continue having double digit annual growth rates also for the coming decade of the 20th. While photon IR detectors have been the drivers for thermal imaging in last century, the innovations in Si microelectronics and MEMS paved the way of success for uncooled thermal detector arrays. Pyroelecgric arrays, which lead to the very first automotive night version camera with 80000 pixels in year 2000 /1/, fell back due to their need of continuous mechanical modulation and the difficulty to integrade pyroelectric sensitive material into monolithic CMOS structures. After that, micro- bolometers dominated the high resolution imaging markets /2/; whike fully monolithic Poly-Si type IR thermopiles where the trendsetters for lower resolution consumer applications.