P1.9 Resonant Sensor for In-Situ Gas Detection in Heat Treatment Processes
- SMSI 2020
(did not take place because of Covid-19 virus pandemic)
- SMSI 2020 - Sensors and Instrumentation
- P1 Chemical Sensors
- S. Schroeder, H. Fritze - Clausthal University of Technology, Goslar (Germany), A. Strauß, P. Quadbeck - Fraunhofer Institute for Manufacturing Technology and Advanced Materials, Dresden (Germany)
- 211 - 212
A gas sensor for monitoring of the furnace atmosphere in the production of titanium and carbon based components is tested. The gas sensor is based on y-cut Ca3TaGaSi2O14 (CTGS) piezoelectric single crystal substrates and thin metal oxide sensor films. TiO2 and Pr0.2Ce0.8O2 sensor films are used for the detection of hydrocarbons, which are formed during the heat treatment of the components men-tioned above. The concentration of hydrocarbons provides feedback on the progress of the processes. The successful operation of the gas sensor at temperatures up to 800 °C and in reducing atmos-pheres is shown.