A3.1 Adjustment Concept for Compensating Stiffness and Tilt Sensitivity of a Novel Monolithic EMFC Weighing Cell
- SMSI 2021
2021-05-03 - 2021-05-06
- SMSI 2021 - Sensors and Instrumentation
- A3 Load and Force Measurement
- M. Pabst, T. Fröhlich, M. Darnieder, R. Theska - Technische Universität Ilmenau, Ilmenau (Germany)
- 53 - 54
This paper describes the experimental investigation of a new adjustment concept for planar monolithic high precision electromagnetic force compensated weighing cells. The concept allows to adjust the stiffness and the tilt sensitivity of the compliant mechanisms to an optimum. A new prototype mechanism is set up and adjusted according to the developed mechanical model. For evaluation of the concept, the system was tested on a high precision tilt table and under high vacuum conditions.