A3.3 Development of a Traceable Cantilever Calibration Device
- SMSI 2021
2021-05-03 - 2021-05-06
- SMSI 2021 - Sensors and Instrumentation
- A3 Load and Force Measurement
- O. Dannberg, T. Fröhlich - Technische Universität Ilmenau, Ilmenau (Germany), M. Kühnel - SIOS Meßtechnik GmbH, Ilmenau (Germany)
- 57 - 58
This paper describes the development of a device that measures the force-displacement-curve of cantilevers to determine their stiffness. An interferometer detects the deflection of the cantilever while the force is measured by a novel EMK load cell with a soft mechanism to provide a high force resolution. The results of first cantilever calibrations with this device showed a low uncertainty and no detectable damage to the tip.