B7.3 Influences of the Microstructure on the Drift Velocity of Electromigrating Aluminum through Molybdenum Disilicide Thin films

Event
SMSI 2021
2021-05-03 - 2021-05-06
digital
Band
SMSI 2021 - Sensors and Instrumentation
Chapter
B7 Sensor Materials I
Author(s)
M. Schädel, J. Baldauf - CiS Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany)
Pages
149 - 150
DOI
10.5162/SMSI2021/B7.3
ISBN
978-3-9819376-4-0
Price
free

Abstract

A difference of the drift velocity of aluminum could be observed for polycrystalline thin film conductor lines made of molybdenum disilicide with different grain sizes in the scanning electron microscope.

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