P14 - Ongoing MEMS-based FAIMS-Research for VOC-Detection
- Event
- SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg - Band
- Poster
- Chapter
- Poster
- Author(s)
- A. Graf, O. Hild - Fraunhofer IPMS, Dresden (Germany), N. Funke - Fraunhofer Center Microelectronic and Optical Syst, Erfurt (Germany)
- Pages
- 306 - 307
- DOI
- 10.5162/SMSI2023/P14
- ISBN
- 978-3-9819376-8-8
- Price
- free
Abstract
Subject of the development is a miniaturized chip-based device that uses ion mobility spectrometry (IMS) for detecting low concentrated volatile organic compounds e. g. in environmental sensing. Focus from preceding development was the fabrication process of the IMS chip with field asymmetric ion mobility (FAIMS) as ion filter. The required electronics were combined with the IMS chip and a demonstrator system has been developed. The measured spectra of exemplary ketones (acetone, 2-hexanone) show typical behavior. This proof of function enables ongoing development towards specific applications.