P17 - Setting up a pressure sensor with flush membrane and without oil filling
- Event
- SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg - Band
- Poster
- Chapter
- Poster
- Author(s)
- T. Frank, S. Hermann, A. Grün, D. Hanig, M. Kermann - CiS Forschungsinstitut für Mikrosensorik, Erfurt (Germany)
- Pages
- 312 - 313
- DOI
- 10.5162/SMSI2023/P17
- ISBN
- 978-3-9819376-8-8
- Price
- free
Abstract
For high-pressure applications over 70 MPa, thin layer technology is mainly used on steel. With this technology, sensors with a front-bundle connection can only be realized with great effort. This paper contains a technology for a sensor with a front-bundle media connection and strict separation to the electrical side. Use are used for cross-no-sensitive SI-DMS. These are added to the media facing the media using a glass frit.