P57 - Piezoresistive Pressure Sensor Technology for Hydrogen Applications at High Temperatures
- Event
- SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg - Band
- Poster
- Chapter
- Poster
- Author(s)
- J. Gramich, O. Braun, M. Rohner, R. Rodrigo, T. Cadonau - Kistler Instrumente AG, Winterthur (Switzerland)
- Pages
- 390 - 391
- DOI
- 10.5162/SMSI2023/P57
- ISBN
- 978-3-9819376-8-8
- Price
- free
Abstract
We report on a piezoresistive pressure sensor technology suited for pressure measurements in the ranges of 50 up to 1000 bar under 100% hydrogen gas in the emerging hydrogen economy. In contrast to existing solutions, the “dry” technology allows for measurements at elevated temperatures of 200°C and potentially above. The sensor is based on a silicon-on-insulator (SOI) block-type chip technology, with a steel membrane transferring the pressure to the sensing element. The proof-of-concept and stability of the technology could be demonstrated under 100% hydrogen up to 200°C.