P38 - Optimization of Micro-Hotplates for better Performance as infrared Emitters
- Event
- SMSI 2023
2023-05-08 - 2023-05-11
Nürnberg - Band
- Poster
- Chapter
- Poster
- Author(s)
- A. Winzer, J. Baldauf, T. Schildhauer, N. Thronicke - CiS Forschungsinstitut für Mikrosensorik GmbH, Erfurt (Germany)
- Pages
- 354 - 355
- DOI
- 10.5162/SMSI2023/P38
- ISBN
- 978-3-9819376-8-8
- Price
- free
Abstract
The optimization process for a particular application of micro-hotplates as infrared emitters is considered. It starts with a baseline combination of technology and design. This combination yields a set of 5 performance parameters (radiant flux, manufacturing costs, modulation speed, power efficiency, and device lifetime). Changes of design or technology often affect more than one parameter in an intricate way. Numerical simulations, which have been verified by experimental data, allow a prediction of the outcome of changes and thus a time and resource saving device optimization.