A6.4 - Characterization of the Polarization State of Embedded Piezoelectric Transducers by Thermal Waves and Thermal Pulses
- AMA Conferences 2015
2015-05-19 - 2015-05-21
- Proceedings SENSOR 2015
- A6 - Material Characterization
- A. Eydam, G. Suchaneck, G. Gerlach - Technische Universität Dresden (Germany)
- 147 - 150
In this work, we demonstrate that thermal methods are a promising approach for non-destructive characterization of the polarization state of embedded piezoelectric transducers in integrated sensoractuator modules. The modules are subjected to periodic heating by a square-wave modulated laser beam or to single-pulse heating by a laser pulse. The frequency or time dependence of the resulting pyroelectric current carries information about the pyroelectric coefficient depth profile which correlates directly with the polarization distribution. In frequency domain, the sample behavior is described by a harmonically heated piezoelectric plate exhibiting heat losses to the environment characterized by a continuous distribution of relaxation times. This analytical model enables additionally the evaluation of the homogeneity of the polarization.