C3.4 - Precise Microacoustic Characterization of new Piezoelectric Crystals for High-Temperature Sensors
- AMA Conferences 2015
2015-05-19 - 2015-05-21
- Proceedings SENSOR 2015
- C3 - High Temperature Sensors
- H. Schmidt, A. Sotnikov, S. Biryukov, M. Weihnacht - IFW Dresden, Dresden (Germany)
- 396 - 401
Promising new single crystals for piezoelectric sensors with high-temperature capability were precisely characterized by a powerful combination of bulk acoustic wave (BAW) and surface acoustic wave (SAW) measurements. Crystals from the langasite (Ca3TaGa3Si2O14) and the oxoborate (GdCa4O(BO3)3 and LaCa4O(BO3)3) family have been investigated in detail and material data were derived with high accuracy at room temperature. Additionally, their behavior was investigated up to high temperatures of about 1000°C demonstrating the capability for high-temperature piezoelectric sensors.