P1.1 - Gasoline sensor based on ZnO
- Event
- AMA Conferences 2015
2015-05-19 - 2015-05-21
Nürnberg, Germany - Band
- Proceedings SENSOR 2015
- Chapter
- P1 - Automotive
- Author(s)
- M. Aleksanyan, V. Arakelyan, V. Aroutiounian, A. Sayunts - Yerevan State University, Yerevan (Armenia)
- Pages
- 740 - 743
- DOI
- 10.5162/sensor2015/P1.1
- ISBN
- 978-3-9813484-8-4
- Price
- free
Abstract
ZnO+1at.%La gas sensitive thin films with different thicknesses were deposited on alumina substrate by the rf magnetron sputtering method using ZnO+1at.%La ceramic target prepared by us. Palladium catalytic particles and interdigited titanium contacts were deposited by ion beam sputtering method on the surface of the sensing layers. The response of semiconductor films to gasoline, toluene and dichlorethan vapors was measured at different operating temperature to 1000 and 2000 ppm gasoline vapor concentration. It was found that the La-doped ZnO sensor with film thickness of 80 nm exhibits high response (120) and selectivity to gasoline vapor (at operating temperature of 350 0C and 2000 ppm gasoline vapor concentration).