P2.1 - Pattern Definition of Foil Based Sensors with Ultrafast UV Lasers

Event
AMA Conferences 2015
2015-05-19 - 2015-05-21
Nürnberg, Germany
Band
Proceedings SENSOR 2015
Chapter
P2 - Mechanical
Author(s)
M. Langosch, M. Cerino, A. Lellig, D. Vollberg, A. Probst, O. Freitag-Weber, G. Schultes - Hochschule für Technik und Wirtschaft des Saarlandes, Saarbrücken (Germany), A. Landes, D. Göttel - Zentrum für Mechatronik und Automatisierungstechnik gemeinnützige GmbH, Saarbrücken (Germany)
Pages
755 - 758
DOI
10.5162/sensor2015/P2.1
ISBN
978-3-9813484-8-4
Price
free

Abstract

Our contribution demonstrates a laser-based patterning technique of a functional thin film on foils of polyimide. Using an ultrafast UV laser, it is possible to remove a highly strain sensitive layer that is based on nickel containing hydrocarbon compounds from the substrate and to create effortlessly an arbitrary design of foil strain gauges in the micrometer range. Furthermore the trimming performance of the laser on diverse designs are discussed. Ultrafast UV lasers are not only a powerful and flexible production tool for foil based sensors but facilitate also prototyping of new layouts for future applications.

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