P7.1 - New Reference Material for Imaging XPS (X-ray Photoelectron Spectroscopy) Instrument Characterization
- Event
- AMA Conferences 2015
2015-05-19 - 2015-05-21
Nürnberg, Germany - Band
- Proceedings SENSOR 2015
- Chapter
- P7 - Spectroscopy
- Author(s)
- S. Bütefisch, T. Weimann, I. Busch, H. Danzebrink - Physikalisch- Technische Bundesanstalt, Braunschweig (Germany), T. Gross, W. Unger, T. Wirth - BAM Bundesanstalt für Materialforschung und -prüfung, Berlin (Germany)
- Pages
- 821 - 825
- DOI
- 10.5162/sensor2015/P7.1
- ISBN
- 978-3-9813484-8-4
- Price
- free
Abstract
Reference materials without variations in topography are essential for the characterization of imaging XPS (X-ray Photoelectron Spectroscopy) Instruments. Therefore a new fabrication process for this kind of zero-topography reference material was developed at PTB and resulted in first prototypes. The fabrication process and first measurement results will be presented in this paper.