A5.1 Design, Simulation, Fabrication and Characterization of Piezoelectric MEMS Cantilever for Gas Density and Viscosity Sensors Applications
- SMSI 2021
2021-05-03 - 2021-05-06
- SMSI 2021 - Sensors and Instrumentation
- A5 MEMS Sensors
- A. Mehdaoui, C. Huber, J. Becker, F. Schraner - TrueDyne Sensors AG, Reinach (Switzerland), L. Villanueva - Ecole Polytechnique Fédérale de Lausanne, Lausanne (Switzerland)
- 67 - 68
A MEMS cantilever based resonant device for gas monitoring actuated and sensed piezoelectrically, has been designed, simulated, fabricated and tested. Aluminum Nitride (AlN) has been used as active material to implement the piezoelectric actuator and sensor. Simulation performed using COMSOL and measurements show a very good agreement. The final system, the full sensor for gas monitoring, allows the measurement of gas density and viscosity at temperatures between 0 and 65 °C and pressures between 1 and 10 bar abs. with accuracies of <0.03 kg/m3 and 6% respectively. The second technological run has shown significant results at the same conditions, respectively of < 0.02 kg/m3 and < 2% for density and viscosity.