A5.2 Swarm-Based Multi-Objective Design Optimization of Single-Plate Condenser MEMS Microphone
- SMSI 2021
2021-05-03 - 2021-05-06
- SMSI 2021 - Sensors and Instrumentation
- A5 MEMS Sensors
- Q. Zaman, S. Alraho, A. König - TU Kaiserslautern, Kaiserslautern (Germany)
- 69 - 70
This work presents a multi-objective optimization of MEMS microphone using the PolyMUMPS fabrication technology. The proposed method handles simultaneous optimization of performance parameters such as sensitivity, lower cut-off frequency, resonance frequency, linearity and noise level. An agglomerative method is being used for multi-objective optimization due to its simplicity. While for efficient exploration of complex search space of MEMS microphone, the traditional particle swarm optimizer has been amended by adaptively adjusting its social and personal best coefficients.