A5.4 Self-excited Contact Resonance Operation of a Tactile Piezoresistive Cantilever Microprobe with Diamond Tip
- SMSI 2021
2021-05-03 - 2021-05-06
- SMSI 2021 - Sensors and Instrumentation
- A5 MEMS Sensors
- M. Fahrbach, E. Peiner - Technische Universität Braunschweig, Braunschweig (Germany), M. Xu, U. Brand - Physikalisch-Technische Bundesanstalt, Braunschweig (Germany)
- 73 - 74
In this work, a self-exciting tactile cantilever sensor for contact resonance applications is described. The design integrates heating resistors with the aim to enable high-speed measurements on large workpieces. For this purpose, higher-order out-of-plane bending modes of the cantilever are favorable. Consequently, the position of the actuators is optimized using finite-element modelling to achieve uniform signal amplitudes for a range of materials when using the third vibration mode. Preliminary measurements with thin polymer films show the basic function of the design.