B9.3 Optimization of ITO-Based Plasmonic Slot Waveguide for CO2 Mid-IR Absorption Sensors
- SMSI 2021
2021-05-03 - 2021-05-06
- SMSI 2021 - Sensors and Instrumentation
- B9 Optical Sensors
- P. Saeidi, B. Jakoby, G. Pühringer, R. Jannesari - Johannes Kepler University Linz, Linz (Austria), A. Tortschanoff - Silicon Austria Labs GmbH, Villach (Austria), T. Grille - Infineon Technologies Austria AG, Villach (Austria)
- 163 - 164
In this work, an ITO-based plasmonic slot waveguide is numerically analyzed for CO2 sensing applications. Our waveguide is designed based on Indium Tin Oxide on a silica substrate layer. As for sensing application both evanescent field ratio and propagation length play an important role, our structure is optimized based on the figure of merit defined by the product of the two aforementioned quantities. From our simulations, the optimum parameters for slot width and height of 500 nm and 1100 nm were obtained, respectively, based on this figure of merit.