A2.1 - Ceramic based pressure sensor with highly sensitive thin film
- AMA Conferences 2015
2015-05-19 - 2015-05-21
- Proceedings SENSOR 2015
- A2 - Mechanical Sensors
- M. Cerino, R. Britz, T. Kuberczyk, M. Langosch, A. Probst, D. Vollberg, G. Schultes - Hochschule für Technik und Wirtschaft HTW saar, Saarbrücken (Germany), D. Göttel, A. Landes - Zentrum für Mechatronik und Automatisierungstechnik ZeMA gGmbH, Saarbrücken (Germany)
- 50 - 54
Nickel containing carbon layers (Ni:a-C:H), deposited under specific conditions in a combined PVD/CVD plasma process show strain sensitivities that are enhanced by a factor of 5 - 15 compared with today's standard sensor thin films. The strain sensitivity (gauge-factors) are about 20, in unpublished developments even about 30. An innovative technological approach for pressure sensors is presented using these Ni:a-C:H layers. Membrane and sensor body are based on the ceramic material ZrO2 stabilized with Y2O3 yielding very good mechanical properties. Due to the ceramics inherent electrical insulation and the use of advanced thin film technology a simplified set-up is feasible. The membrane carries a highly sensitive layer that is structured to a Wheatstone bridge just by some laser cuts. Electrical contacts are securely bonded directly onto the sensor layer without the need for contact layers. We further demonstrate a construction and assembling technique of the complete pressure sensor including threat and housing. First results for prototypes of pressure sensors with a nominal capacity of 100 bar are discussed.