E6.3 - Miniaturized Photoacoustic CO2 Sensors for Consumer Applications
- AMA Conferences 2015
2015-05-19 - 2015-05-21
- Proceedings SENSOR 2015
- E6 - Gas Sensors II
- J. Huber - Fraunhofer Institute for Physical Measurement Techniques (IPM), Freiburg (Germany), J. Wöllenstein - University of Freiburg (Germany), S. Kolb, A. Dehé, F. Jost - Infineon Technologies AG, München (Germany)
- 688 - 692
We present a sensor concept for a photoacoustic CO2 sensor with potential for consumer application mass market. The system consists of an IR-source and a silicon microphone as detector in a sealed detection chamber with integrated target gas. The detection chamber serves as gas selective filter of the sensor. A detailed simulation model allows prediction of system behavior and the investigation of relevant parameters for a further miniaturization process. All active components are silicon based. A full integration in silicon MEMS technology is possible. Sensor prototypes and characterization measurements are shown. The presented system shows high potential for integration and miniaturization.