C8.1 - Modelling and Control of a Pressure and Temperature Test Chamber for Pure Mems Pressure Sensors
- AMA Conferences 2015
2015-05-19 - 2015-05-21
- Proceedings SENSOR 2015
- C8 - Calibration & Testing
- J. Lotichius, E. Christmann, R. Werthschützky - Technische Universität Darmstadt (Germany)
- 478 - 482
This paper presents the state space modelling of a temperature test chamber with 0.25 l volume that is tempered with a peltier device. A thermodynamic model of the test chamber is presented, giving different temperatures from heat gain, thermal loss network, incoming air temperature and airflow. Available temperature sensors are evaluated for their measurement uncertainty and an integrated solution is chosen. Control of the peltier device is discussed and based on the thermodynamic model a PI controller is chosen. A prototype is presented and model parameters are identified based on the step response. Static Accuracy is shown to be within 0.2 K with the PI controller.