C8.4 - Partially Estimated Polynomial MEMS Sensor Calibration

Event
AMA Conferences 2015
2015-05-19 - 2015-05-21
Nürnberg, Germany
Band
Proceedings SENSOR 2015
Chapter
C8 - Calibration & Testing
Author(s)
A. Dickow, G. Feiertag - Munich University of Applied Sciences (Germany)
Pages
495 - 499
DOI
10.5162/sensor2015/C8.4
ISBN
978-3-9813484-8-4
Price
free

Abstract

MEMS sensors are individually calibrated to reach a high sensing accuracy. For calibration certain measurement points are selected as reference and used to calculate the parameters of a calibration polynomial function. To minimize the calibration costs, MEMS sensor calibration should be performed using as few calibration points as possible. We propose a calibration approach which gives good accuracy with less measurement points. The approach combines a systematic calibration method with statistical parameter estimation, to find appropriate measurement points for calibration and minimize the number of calibration points. An experiment with a set of commercial barometric MEMS pressure sensors validates the proposed method for MEMS barometric pressure sensors.

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