C8.4 - Partially Estimated Polynomial MEMS Sensor Calibration
- AMA Conferences 2015
2015-05-19 - 2015-05-21
- Proceedings SENSOR 2015
- C8 - Calibration & Testing
- A. Dickow, G. Feiertag - Munich University of Applied Sciences (Germany)
- 495 - 499
MEMS sensors are individually calibrated to reach a high sensing accuracy. For calibration certain measurement points are selected as reference and used to calculate the parameters of a calibration polynomial function. To minimize the calibration costs, MEMS sensor calibration should be performed using as few calibration points as possible. We propose a calibration approach which gives good accuracy with less measurement points. The approach combines a systematic calibration method with statistical parameter estimation, to find appropriate measurement points for calibration and minimize the number of calibration points. An experiment with a set of commercial barometric MEMS pressure sensors validates the proposed method for MEMS barometric pressure sensors.