P8.7 - Micro gas sensor by MEMS processes for selective dual gas detection of carbon monoxide and methane
- AMA Conferences 2015
2015-05-19 - 2015-05-21
- Proceedings SENSOR 2015
- P8 - Gas
- K. Nam - Ajou University, Suwon Gyeonggi-do (South Korea), I. Kim - R&D Center, Maccon Inc., Bucheon Gyeonggi-do (South Korea), W. Choi - Gangneung-Wonju National University, Gangneung Gangwon (South Korea), Y. Song - Korea Institute of Science and Technology, Seongbuk-gu Seoul (South Korea)
- 848 - 850
We have designed and fabricated micro platform for gas sensor including micro heater and electrode using micro electro-mechanical system (MEMS) processes, and SnO2 nanopowder have been mounted on the platform. The fabricated micro platform was 2.5 mm × 2.5 mm in size and power consumptions were 9 mW and 110 mW for CO and CH4 operation temperatures, respectively. The gas sensing performances for 200 ppm CO and 12,500 ppm CH4 were investigated at 50 °C and 330 °C.