P2.11 Multiphysics Electro-Thermal Simulation of Pt Microheater Structures for Gas Sensing Application
- SMSI 2020
(did not take place because of Covid-19 virus pandemic)
- SMSI 2020 - Sensors and Instrumentation
- P2 Sensors and Measurement Systems for Physical Quantities
- F. Gomes, S. Linke - TE Connectivity Sensors Germany GmbH, Dortmund (Germany), P. Wafo, V. Leger - TE Sensor Solutions, Toulouse (France)
- 246 - 247
Air quality sensing is growing fast in several applications, such as monitoring air quality in automobiles, smart homes or industrial processes. Metal-oxide semiconductor-based sensors require a chemical inert microheater with long lifetime and fast response time. To meet the requirements of the nextgen microheaters, a thorough understanding of the complex interplay between the underlying thermal conduction, convection and radiation processes is needed, which is obtained through FE simulations. The results will help to optimize and miniaturize microheater design arrays for next-gen gas sensors.