1.1.1 - Sensor-on-LED: Visible-Light-Activated Gas Sensing Using Flame Spray Pyrolysis
- Event
- EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich - Band
- Lectures
- Chapter
- Chemical Sensors
- Author(s)
- X. -X. Wang - University of Bremen,Bremen (Germany), L. Mädler - Leibniz Institute for Materials Engineering IWT,Bremen (Germany)
- Pages
- 40 - 41
- DOI
- 10.5162/eurosensors2026/1.1.1
- ISBN
- 978-3-910600-12-6
- Price
- free
Abstract
Visible-light-activated gas sensors require not only compact optical integration, but also sensing-layer fabrication compatible with wafer-level processing. In this work, we focus on the engineering of porous WO3-x sensing layers directly deposited onto LED microchip arrays via flame spray pyrolysis (FSP). Using a 460 nm sensor-on-LED platform as a model system, we investigate how FSP deposi-tion conditions define film thickness and surface chemistry. The resulting highly porous WO3-x films enable efficient gas access, visible-light interaction, and scalable wafer-level integration without post-treatment.