7.1.4 - Gas sensing applications of CuO doped with metallic catalyst fabricated by spark ablation

Event
EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich
Band
Lectures
Chapter
Chemical Sensors
Author(s)
C. Maier, L. Egger, B. Kosednar-Legenstein - Materials Center Leoben Forschung GmbH,Leoben (Austria), N. Rising, L. Sacco - Vsparticle B.v.,Delft (The Netherlands)
Pages
226 - 227
DOI
10.5162/eurosensors2026/7.1.4
ISBN
978-3-910600-12-6
Price
free

Abstract

In this work, we present chemical nanosensors based on thin CuO films, which are fabricated by spark ablation paired with a dry printing system and subsequent oxidation on Si 3 N 4 -based micro-hotplate chips. The sensors are tested against various target gases like carbon monoxide (CO), carbon dioxide (CO 2 ), hydrocarbons (HC Mix ) and formaldehyde (CH 2 O). An investigation was conducted into various combinations of metallic catalysts, with a particular focus on the CuO, with the objective of reducing the operational temperature.

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