7.1.3 - Physics-Based Dynamic Estimation of NO₂ and H₂O Concentrations with CNT-FETs and Extended Kalman Filter
- Event
- EUROSENSORS 2026
2026-09-06 - 2026-09-09
Zurich - Band
- Lectures
- Chapter
- Chemical Sensors
- Author(s)
- C. Gentili, C. I. Roman, I. Kraiem, M. Haluska, C. Hierold - ETH Zürich,Zürich (Switzerland)
- Pages
- 224 - 225
- DOI
- 10.5162/eurosensors2026/7.1.3
- ISBN
- 978-3-910600-12-6
- Price
- free
Abstract
In this work, we present chemical nanosensors based on thin CuO films, which are fabricated by spark ablation paired with a dry printing system and subsequent oxidation on Si 3 N 4 -based micro-hotplate chips. The sensors are tested against various target gases like carbon monoxide (CO), carbon dioxide (CO 2 ), hydrocarbons (HC Mix ) and formaldehyde (CH 2 O). An investigation was conducted into various combinations of metallic catalysts, with a particular focus on the CuO, with the objective of reducing the operational temperature.